Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8147909 | Method of making and using alloy susceptor with improved properties for film deposition | Shuo-Jieh Wu, Hsu Chun Yuan, Steven T. Li, Hs Chiu, Yen-Yu Chen +3 more | 2012-04-03 |
| 7518129 | Preventing dosage drift with duplicate dose integrators | Jih-Hwa Wang, Otto Chen, Fang-Chi Chien, Pu Chen | 2009-04-14 |
| 7446056 | Method for increasing polysilicon grain size | Yao-Hui Huang, Chih-Hao Lin, Yen-Fei Lin, James J. Sun, Chen Pu-Fang +1 more | 2008-11-04 |
| 6678581 | Method of calibrating a wafer edge gripping end effector | Kwun-Goo Hung, Ko-Chin Chung, Fan-Lin Lu | 2004-01-13 |
| 6646752 | Method and apparatus for measuring thickness of a thin oxide layer | Pu Chen, Bing Huei Perng, Chao Po Leu | 2003-11-11 |
| 5951196 | Frictional mount for engaging a monitor in a process chamber and method of using | Chih-Yuan Ke, Chien-Rong Huang, Sheng-Kuo Huang | 1999-09-14 |