Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170208 | Method for managing temperature in semiconductor fabrication facility | Ying-Yen Tseng, Wen-Yu Ku, Chia-Chih Chen | 2024-12-17 |
| 12033873 | Wafer cooling system | Chia-Chih Chen | 2024-07-09 |
| 11996276 | Ion collector for use in plasma systems | Chi-Ying Wu, Chia-Chih Chen | 2024-05-28 |
| 11581169 | Ion collector for use in plasma systems | Chi-Ying Wu, Chia-Chih Chen | 2023-02-14 |
| 11569099 | Wafer cooling system | Chia-Chih Chen | 2023-01-31 |
| 10872789 | Wafer cooling system | Chia-Chih Chen | 2020-12-22 |
| 10553411 | Ion collector for use in plasma systems | Chi-Ying Wu, Chiah-Chih Chen | 2020-02-04 |
| 7518129 | Preventing dosage drift with duplicate dose integrators | Jih-Hwa Wang, Fang-Chi Chien, Tung-Li Lee, Pu Chen | 2009-04-14 |