Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7446056 | Method for increasing polysilicon grain size | Yao-Hui Huang, Tung-Li Lee, Chih-Hao Lin, Yen-Fei Lin, Chen Pu-Fang +1 more | 2008-11-04 |
| 6805907 | Method and apparatus for vapor generation and film deposition | Benjamin Y. H. Liu | 2004-10-19 |
| 6746539 | Scanning deposition head for depositing particles on a wafer | Benjamin Y. H. Liu | 2004-06-08 |
| 6607597 | Method and apparatus for deposition of particles on surfaces | Benjamin Y. H. Liu | 2003-08-19 |
| 6601777 | Suspended particle container for an atomizer | Benjamin Y. H. Liu, Michael Rosen | 2003-08-05 |
| 6527821 | Automatic condensed oil remover | Benjamin Y. H. Liu | 2003-03-04 |
| 6409839 | Method and apparatus for vapor generation and film deposition | Benjamin Y. H. Liu | 2002-06-25 |
| 6364941 | Compact high efficiency electrostatic precipitator for droplet aerosol collection | Benjamin Y. H. Liu | 2002-04-02 |
| 6349668 | Method and apparatus for thin film deposition on large area substrates | Benjamin Y. H. Liu, Virgil A. Marple | 2002-02-26 |
| 6221136 | Compact electrostatic precipitator for droplet aerosol collection | Benjamin Y. H. Liu | 2001-04-24 |
| 5940175 | Method and apparatus for surface inspection in a chamber | — | 1999-08-17 |
| 5916640 | Method and apparatus for controlled particle deposition on surfaces | Benjamin Y. H. Liu | 1999-06-29 |
| 5609798 | High output PSL aerosol generator | Benjamin Y. H. Liu | 1997-03-11 |