Issued Patents All Time
Showing 25 most recent of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11085861 | Apparatus for real-time size-distributed measurement of aerosol mass concentration | Modi Chen, Lin Li, Virgil A. Marple, Amir A. Naqwi, Francisco J. Romay +1 more | 2021-08-10 |
| 10287679 | Apparatus and method for vapor generation and film deposition | Thuc M. Dinh, Yamin Ma | 2019-05-14 |
| 9895707 | Method and apparatus for generating monodisperse aerosols | Hongxu Duan, Francisco J. Romay, Amir A. Naqwi | 2018-02-20 |
| 9797593 | Apparatus and method for vapor generation and film deposition | Thuc M. Dinh, Yamin Ma | 2017-10-24 |
| 9768005 | Electrospray ionizer for mass spectrometry of aerosol particles | Siqin He, Chris Hogan, Lin Li, Amir A. Naqwi, Francisco J. Romay | 2017-09-19 |
| 9764333 | Electrical ionizer for aerosol charge conditioning and measurement | William D. Dick, Francisco J. Romay | 2017-09-19 |
| 9541488 | Particle sampling and measurement in the ambient air | Virgil A. Marple, Francisco J. Romay, Lin Li | 2017-01-10 |
| 9089800 | Method and apparatus for vapor and gas filtration | Yamin Ma, Thuc M. Dinh | 2015-07-28 |
| 8986784 | Fine droplet atomization for liquid precursor vaporization | Thuc M. Dinh, Yamin Ma | 2015-03-24 |
| 8945281 | Method and apparatus for vapor generation and wafer cleaning | Thuc M. Dinh, Yamin Ma | 2015-02-03 |
| 8783652 | Liquid flow control for film deposition | Thuc M. Dinh, Yamin Ma | 2014-07-22 |
| 8728240 | Apparatus for vapor condensation and recovery | Thuc M. Dinh, Yamin Ma | 2014-05-20 |
| 8711338 | Apparatus for counting particles in a gas | Thuc M. Dinh, William D. Dick, Aaron Michael Collins, Francisco J. Romay | 2014-04-29 |
| 8603580 | High stability and high capacity precursor vapor generation for thin film deposition | — | 2013-12-10 |
| 8603247 | Apparatus for counting particles in a gas | Thuc M. Dinh, William D. Dick, Aaron Michael Collins, Francisco J. Romay | 2013-12-10 |
| 8554064 | Method and apparatus for generating vapor at high rates | Thuc M. Dinh, Yamin Ma | 2013-10-08 |
| 8529985 | Method for liquid precursor atomization | — | 2013-09-10 |
| 8511583 | Fine droplet atomizer for liquid precursor vaporization | Thuc M. Dinh, Yamin Ma | 2013-08-20 |
| 8465791 | Method for counting particles in a gas | Thuc M. Dinh, William D. Dick, Aaron Michael Collins, Francisco J. Romay | 2013-06-18 |
| 8393599 | Apparatus for liquid precursor atomization | — | 2013-03-12 |
| 8297223 | Method and apparatus for particle filtration and enhancing tool performance in film deposition | Yamin Ma, Thuc M. Dinh | 2012-10-30 |
| 8132793 | Method and apparatus for liquid precursor atomization | — | 2012-03-13 |
| 7882799 | Method and apparatus for generating charged particles for deposition on a surface | William D. Dick | 2011-02-08 |
| 7830510 | Apparatus for high-accuracy fiber counting in air | William D. Dick, Francisco J. Romay, Mark J. Battista, Pedro Lilienfeld | 2010-11-09 |
| 7363828 | Aerosol measurement by dilution and particle counting | — | 2008-04-29 |