Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10287679 | Apparatus and method for vapor generation and film deposition | Thuc M. Dinh, Benjamin Y. H. Liu | 2019-05-14 |
| 9797593 | Apparatus and method for vapor generation and film deposition | Thuc M. Dinh, Benjamin Y. H. Liu | 2017-10-24 |
| 9089800 | Method and apparatus for vapor and gas filtration | Benjamin Y. H. Liu, Thuc M. Dinh | 2015-07-28 |
| 8986784 | Fine droplet atomization for liquid precursor vaporization | Benjamin Y. H. Liu, Thuc M. Dinh | 2015-03-24 |
| 8945281 | Method and apparatus for vapor generation and wafer cleaning | Thuc M. Dinh, Benjamin Y. H. Liu | 2015-02-03 |
| 8783652 | Liquid flow control for film deposition | Thuc M. Dinh, Benjamin Y. H. Liu | 2014-07-22 |
| 8728240 | Apparatus for vapor condensation and recovery | Benjamin Y. H. Liu, Thuc M. Dinh | 2014-05-20 |
| 8554064 | Method and apparatus for generating vapor at high rates | Thuc M. Dinh, Benjamin Y. H. Liu | 2013-10-08 |
| 8511583 | Fine droplet atomizer for liquid precursor vaporization | Benjamin Y. H. Liu, Thuc M. Dinh | 2013-08-20 |
| 8297223 | Method and apparatus for particle filtration and enhancing tool performance in film deposition | Benjamin Y. H. Liu, Thuc M. Dinh | 2012-10-30 |
| 6293157 | Compensation of coriolis meter motion induced signal | James D. Adams, Thomas Brennan | 2001-09-25 |
| 5647543 | Electrostatic ionizing system | — | 1997-07-15 |
| 5364035 | High voltage sealing and isolation via dynamic seals | Lawrence J. Lunzer, Norman N. Fender | 1994-11-15 |
| 5346134 | CO.sub.2 -assisted spray gun and nozzle | Richard Grady, Robert J. Lind, Tera D. McCutcheon | 1994-09-13 |