Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10287679 | Apparatus and method for vapor generation and film deposition | Yamin Ma, Benjamin Y. H. Liu | 2019-05-14 |
| 9797593 | Apparatus and method for vapor generation and film deposition | Yamin Ma, Benjamin Y. H. Liu | 2017-10-24 |
| 9089800 | Method and apparatus for vapor and gas filtration | Benjamin Y. H. Liu, Yamin Ma | 2015-07-28 |
| 8986784 | Fine droplet atomization for liquid precursor vaporization | Benjamin Y. H. Liu, Yamin Ma | 2015-03-24 |
| 8945281 | Method and apparatus for vapor generation and wafer cleaning | Yamin Ma, Benjamin Y. H. Liu | 2015-02-03 |
| 8783652 | Liquid flow control for film deposition | Benjamin Y. H. Liu, Yamin Ma | 2014-07-22 |
| 8728240 | Apparatus for vapor condensation and recovery | Benjamin Y. H. Liu, Yamin Ma | 2014-05-20 |
| 8711338 | Apparatus for counting particles in a gas | Benjamin Y. H. Liu, William D. Dick, Aaron Michael Collins, Francisco J. Romay | 2014-04-29 |
| 8603247 | Apparatus for counting particles in a gas | Benjamin Y. H. Liu, William D. Dick, Aaron Michael Collins, Francisco J. Romay | 2013-12-10 |
| 8554064 | Method and apparatus for generating vapor at high rates | Yamin Ma, Benjamin Y. H. Liu | 2013-10-08 |
| 8511583 | Fine droplet atomizer for liquid precursor vaporization | Benjamin Y. H. Liu, Yamin Ma | 2013-08-20 |
| 8465791 | Method for counting particles in a gas | Benjamin Y. H. Liu, William D. Dick, Aaron Michael Collins, Francisco J. Romay | 2013-06-18 |
| 8297223 | Method and apparatus for particle filtration and enhancing tool performance in film deposition | Benjamin Y. H. Liu, Yamin Ma | 2012-10-30 |