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Apparatus and method for vapor generation and film deposition |
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2019-05-14 |
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Apparatus and method for vapor generation and film deposition |
Yamin Ma, Benjamin Y. H. Liu |
2017-10-24 |
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Method and apparatus for vapor and gas filtration |
Benjamin Y. H. Liu, Yamin Ma |
2015-07-28 |
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Fine droplet atomization for liquid precursor vaporization |
Benjamin Y. H. Liu, Yamin Ma |
2015-03-24 |
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Method and apparatus for vapor generation and wafer cleaning |
Yamin Ma, Benjamin Y. H. Liu |
2015-02-03 |
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Liquid flow control for film deposition |
Benjamin Y. H. Liu, Yamin Ma |
2014-07-22 |
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Apparatus for vapor condensation and recovery |
Benjamin Y. H. Liu, Yamin Ma |
2014-05-20 |
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Apparatus for counting particles in a gas |
Benjamin Y. H. Liu, William D. Dick, Aaron Michael Collins, Francisco J. Romay |
2014-04-29 |
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Apparatus for counting particles in a gas |
Benjamin Y. H. Liu, William D. Dick, Aaron Michael Collins, Francisco J. Romay |
2013-12-10 |
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Method and apparatus for generating vapor at high rates |
Yamin Ma, Benjamin Y. H. Liu |
2013-10-08 |
| 8511583 |
Fine droplet atomizer for liquid precursor vaporization |
Benjamin Y. H. Liu, Yamin Ma |
2013-08-20 |
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Method for counting particles in a gas |
Benjamin Y. H. Liu, William D. Dick, Aaron Michael Collins, Francisco J. Romay |
2013-06-18 |
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Method and apparatus for particle filtration and enhancing tool performance in film deposition |
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2012-10-30 |