Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8216640 | Method of making showerhead for semiconductor processing apparatus | Ben Chao, Yen-Si Chen | 2012-07-10 |
| 7381266 | Sapphire crystal growth method | — | 2008-06-03 |
| 6500263 | Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levels | Wen Xiao Chen, Gwo-Chuan Tzu | 2002-12-31 |
| 6156079 | Window support member for a semiconductor processing system | Henry Ho, Kuo-Chun Wu, Steven Chen | 2000-12-05 |