Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10167812 | Radiation thermal absorber based on characteristic absorption spectrum, and stirling engine and operation method thereof | Gang Xiao, Min Qiu, Mingjiang Ni, Qiang Li, Zhongyang Luo +1 more | 2019-01-01 |
| 7972663 | Method and apparatus for forming a high quality low temperature silicon nitride layer | Errol Antonio C. Sanchez, Aihua Chen | 2011-07-05 |
| 7745329 | Tungsten nitride atomic layer deposition processes | Ulrich Kroemer, Lee Luo, Aihua Chen, Ming Li | 2010-06-29 |
| 7658800 | Gas distribution assembly for use in a semiconductor work piece processing reactor | Aihua Chen, Henry Ho, Gerald Yin, Qing Lv, Li Fu | 2010-02-09 |
| 7611976 | Gate electrode dopant activation method for semiconductor manufacturing | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2009-11-03 |
| 7429516 | Tungsten nitride atomic layer deposition processes | Ulrich Kroemer, Lee Luo, Aihua Chen, Ming Li | 2008-09-30 |
| 7365029 | Method for silicon nitride chemical vapor deposition | R. Suryanarayanan Iyer, Sean M. Seutter, Sanjeev Tandon, Errol Antonio C. Sanchez | 2008-04-29 |
| 7335266 | Method of forming a controlled and uniform lightly phosphorous doped silicon film | Li Fu, Sheeba J. Panayil, Christopher Quentin, Lee Luo, Aihua Chen +1 more | 2008-02-26 |
| 7265036 | Deposition of nano-crystal silicon using a single wafer chamber | Sheeba J. Panayil, Ming Li, Jonathan Pickering | 2007-09-04 |
| 7250268 | Assay for measuring IκB kinase activity and identifying IκB kinase modulators | James Burke | 2007-07-31 |
| 7172792 | Method for forming a high quality low temperature silicon nitride film | Errol Antonio C. Sanchez, Aihua Chen | 2007-02-06 |
| 7115499 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Ulrich Kroemer, Lee Luo, Aihua Chen, Ming Li | 2006-10-03 |
| 7078302 | Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2006-07-18 |
| 6991999 | Bi-layer silicon film and method of fabrication | Li Fu, Luo Lee, Steven Chen, Errol Antonio C. Sanchez | 2006-01-31 |
| 6982214 | Method of forming a controlled and uniform lightly phosphorous doped silicon film | Li Fu, Sheeba J. Panayil, Christopher Quentin, Lee Luo, Aihua Chen +1 more | 2006-01-03 |
| 6833161 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Ulrich Kroemer, Lee Luo, Aihua Chen, Ming Li | 2004-12-21 |
| 6802906 | Emissivity-change-free pumping plate kit in a single wafer chamber | Xiaoliang Jin, Lee Luo, Henry Ho, Steven Chen | 2004-10-12 |
| 6726955 | Method of controlling the crystal structure of polycrystalline silicon | Steven Chen, Lee Luo, Errol Antonio C. Sanchez | 2004-04-27 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more | 2003-06-24 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Lee Luo, Steven Chen, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more | 2003-05-06 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Lee Luo, Kegang Huang, Sang-Hoon Ahn | 2003-05-06 |
| 6555183 | Plasma treatment of a titanium nitride film formed by chemical vapor deposition | Ming Xi, Zvi Lando, Mei Chang | 2003-04-29 |
| 6548402 | Method of depositing a thick titanium nitride film | Ming Xi, Frederick Wu, Ramanujapuram A. Srinivas, Yehuda Demayo, Zvi Lando +2 more | 2003-04-15 |
| 6524952 | Method of forming a titanium silicide layer on a substrate | Ramanujapuram A. Srinivas, Brian Metzger, Frederick Wu | 2003-02-25 |
| 6488776 | Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films | — | 2002-12-03 |