Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10239160 | Systems and processes that singulate materials | Michael Mielke, Tim Booth, Thor Miller Wilbanks | 2019-03-26 |
| 9919380 | Shaping of brittle materials with controlled surface and bulk properties | David M. Gaudiosi, Timothy Booth, Michael Shirk, Eric Juban, Michael Mielke | 2018-03-20 |
| 9120181 | Singulation of layered materials using selectively variable laser output | Michael Greenberg, David M. Gaudiosi, Michael Mielke, Tim Booth | 2015-09-01 |
| 9114482 | Laser based processing of layered materials | Michael Greenberg, David M. Gaudiosi, Michael Mielke, Tim Booth | 2015-08-25 |
| 6573181 | Method of forming contact structures using nitrogen trifluoride preclean etch process and a titanium chemical vapor deposition step | Mohan K. Bhan, Jennifer Kopp | 2003-06-03 |
| 6548402 | Method of depositing a thick titanium nitride film | Shulin Wang, Ming Xi, Frederick Wu, Yehuda Demayo, Zvi Lando +2 more | 2003-04-15 |
| 6524952 | Method of forming a titanium silicide layer on a substrate | Brian Metzger, Shulin Wang, Frederick Wu | 2003-02-25 |
| 6432479 | Method for in-situ, post deposition surface passivation of a chemical vapor deposited film | Mei Chang, Li Wu | 2002-08-13 |
| 6242347 | Method for cleaning a process chamber | Anand Vasudev, Toshio Itoh, Frederick Wu, Li Wu, Brian Boyle +1 more | 2001-06-05 |
| 6193813 | Utilization of SiH4 soak and purge in deposition processes | Meng Chu Tseng, Mei Chang, Klaus-Dieter Rinnen, Moshe Eizenberg, Susan Telford | 2001-02-27 |
| 5940733 | Method of making polysilicon/tungsten silicide multilayer composite on an integrated circuit structure | Israel Beinglass | 1999-08-17 |
| 5817576 | Utilization of SiH.sub.4 soak and purge in deposition processes | Meng Chu Tseng, Mei Chang, Klaus-Dieter Rinnen, Moshe Eizenberg, Susan Telford | 1998-10-06 |
| 5780360 | Purge in silicide deposition processes dichlorosilane | Jennifer Meng Chu Tseng, Mei Chang, Klaus-Dieter Rinnen, Moshe Eizenberg, Susan Telford | 1998-07-14 |