| 9032906 |
Apparatus and process for plasma-enhanced atomic layer deposition |
Paul F. Ma, Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal +1 more |
2015-05-19 |
$22,098,000 |
| 7850779 |
Apparatus and process for plasma-enhanced atomic layer deposition |
Paul F. Ma, Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal +1 more |
2010-12-14 |
$16,316,000 |
| 7833358 |
Method of recovering valuable material from exhaust gas stream of a reaction chamber |
Schubert S. Chu, Christophe Marcadal, Seshadri Ganguli, Dien-Yeh Wu, Kavita Shah +1 more |
2010-11-16 |
$8,660,000 |
| 7682946 |
Apparatus and process for plasma-enhanced atomic layer deposition |
Paul F. Ma, Kavita Shah, Dien-Yeh Wu, Seshadri Ganguli, Christophe Marcadal +1 more |
2010-03-23 |
$9,727,000 |
| 7605083 |
Formation of composite tungsten films |
Ken Kaung Lai, Jeong Soo Byun, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more |
2009-10-20 |
$54,871,000 |
| 7384867 |
Formation of composite tungsten films |
Ken Kaung Lai, Jeong Soo Byun, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more |
2008-06-10 |
$47,143,000 |
| 6939804 |
Formation of composite tungsten films |
Ken Kaung Lai, Jeong Soo Byun, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more |
2005-09-06 |
$20,356,000 |
| 6548402 |
Method of depositing a thick titanium nitride film |
Shulin Wang, Ming Xi, Ramanujapuram A. Srinivas, Yehuda Demayo, Zvi Lando +2 more |
2003-04-15 |
$39,567,000 |
| 6524952 |
Method of forming a titanium silicide layer on a substrate |
Ramanujapuram A. Srinivas, Brian Metzger, Shulin Wang |
2003-02-25 |
$21,067,000 |
| 6482746 |
Computer readable medium for controlling a method of cleaning a process chamber |
Anand Vasudev, Toshio Itoh, Ramamujapuram A. Srinivas, Li Wu, Brian Boyle +1 more |
2002-11-19 |
$61,156,000 |
| 6242347 |
Method for cleaning a process chamber |
Anand Vasudev, Toshio Itoh, Ramanujapuram A. Srinivas, Li Wu, Brian Boyle +1 more |
2001-06-05 |
$95,683,000 |
| 6221174 |
Method of performing titanium/titanium nitride integration |
Fufa Chen, Yin Lin, Jianhua Hu, Ming Xi, Li Wu |
2001-04-24 |
$56,824,000 |
