Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8183132 | Methods for fabricating group III nitride structures with a cluster tool | Sandeep Nijhawan, Brian H. Burrows, Tetsuya Ishikawa, Olga Kryliouk, Jie Su +6 more | 2012-05-22 |
| 8075789 | Remote plasma cleaning source having reduced reactivity with a substrate processing chamber | Karl A. Littau, Chiliang Chen | 2011-12-13 |
| 6482746 | Computer readable medium for controlling a method of cleaning a process chamber | Toshio Itoh, Ramamujapuram A. Srinivas, Frederick Wu, Li Wu, Brian Boyle +1 more | 2002-11-19 |
| 6242347 | Method for cleaning a process chamber | Toshio Itoh, Ramanujapuram A. Srinivas, Frederick Wu, Li Wu, Brian Boyle +1 more | 2001-06-05 |
| 6125859 | Method for improved cleaning of substrate processing systems | Chien-Teh Kao, Karl A. Littau, Dong Won Koo | 2000-10-03 |