FC

Fufa Chen

A( Acm Research (Shanghai): 13 patents #8 of 43Top 20%
Applied Materials: 9 patents #1,414 of 7,310Top 20%
AR Acm Research: 5 patents #2 of 14Top 15%
Overall (All Time): #143,527 of 4,157,543Top 4%
27
Patents All Time

Issued Patents All Time

Showing 1–25 of 27 patents

Patent #TitleCo-InventorsDate
12111575 Coater with automatic cleaning function and coater automatic cleaning method Hui Wang, Fuping Chen, Wenjun Wang, Hongchao Yang, Voha Nuch +3 more 2024-10-08
11967497 Methods and apparatus for cleaning semiconductor wafers Jun Wang, Hui Wang, Fuping Chen, Jian Wang, Xi Wang +5 more 2024-04-23
11911808 System for cleaning semiconductor wafers Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2024-02-27
11911807 Method and apparatus for cleaning substrates Hui Wang, Xi Wang, Fuping Chen, Xiaoyan Zhang 2024-02-27
11848217 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more 2023-12-19
11752529 Method for cleaning semiconductor wafers Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2023-09-12
11638937 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more 2023-05-02
11633765 System for cleaning semiconductor wafers Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2023-04-25
11581205 Methods and system for cleaning semiconductor wafers Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2023-02-14
11257667 Methods and apparatus for cleaning semiconductor wafers Jun Wang, Hui Wang, Fuping Chen, Jian Wang, Xi Wang +5 more 2022-02-22
11141762 System for cleaning semiconductor wafers Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2021-10-12
11103898 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more 2021-08-31
11037804 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more 2021-06-15
10910244 Methods and system for cleaning semiconductor wafers Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2021-02-02
10816901 Coater with automatic cleaning function and coater automatic cleaning method Hui Wang, Fuping Chen, Wenjun Wang, Hongchao Yang, Voha Nuch +3 more 2020-10-27
10770335 Substrate supporting apparatus Zhiyou Fang, Jun Wu, Hui Wang, Fuping Chen, Wenjun Wang 2020-09-08
8671961 Methods and apparatus for cleaning semiconductor wafers Voha Nuch, David Xuan-Qi Wang, Yue Ma, Jian Wang, Yunwen Huang +2 more 2014-03-18
8580042 Methods and apparatus for cleaning semiconductor wafers Voha Nuch, David Xuan-Qi Wang, Yue Ma, Jian Wang, Yunwen Huang +2 more 2013-11-12
6660135 Staged aluminum deposition process for filling vias Sang Ho Yu, Yonghwa Chris Cha, Murali Abburi, Shri Singhvi 2003-12-09
6436820 Method for the CVD deposition of a low residual halogen content multi-layered titanium nitride film having a combined thickness greater than 1000 å Jianhua Hu, Yin Lin, Yehuda Demayo, Ming Xi 2002-08-20
6364949 300 mm CVD chamber design for metal-organic thin film deposition David T. Or, Keith Kuang-Kuo Koai, Lawrence Chung-Lai Lei 2002-04-02
6352620 Staged aluminum deposition process for filling vias Sang Ho Yu, Yonghwa Chris Cha, Murali Abburi, Shri Singhvi 2002-03-05
6332601 Liquid vaporizers for semiconductor processing systems Joel M. Huston 2001-12-25
6220091 Liquid level pressure sensor and method Yu-Chia Chang, Gwo-Chuan Tzu 2001-04-24
6221174 Method of performing titanium/titanium nitride integration Yin Lin, Jianhua Hu, Frederick Wu, Ming Xi, Li Wu 2001-04-24