Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111575 | Coater with automatic cleaning function and coater automatic cleaning method | Hui Wang, Fuping Chen, Wenjun Wang, Hongchao Yang, Voha Nuch +3 more | 2024-10-08 |
| 11967497 | Methods and apparatus for cleaning semiconductor wafers | Jun Wang, Hui Wang, Fuping Chen, Jian Wang, Xi Wang +5 more | 2024-04-23 |
| 11911808 | System for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2024-02-27 |
| 11911807 | Method and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Xiaoyan Zhang | 2024-02-27 |
| 11848217 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more | 2023-12-19 |
| 11752529 | Method for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2023-09-12 |
| 11638937 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more | 2023-05-02 |
| 11633765 | System for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2023-04-25 |
| 11581205 | Methods and system for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2023-02-14 |
| 11257667 | Methods and apparatus for cleaning semiconductor wafers | Jun Wang, Hui Wang, Fuping Chen, Jian Wang, Xi Wang +5 more | 2022-02-22 |
| 11141762 | System for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2021-10-12 |
| 11103898 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more | 2021-08-31 |
| 11037804 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more | 2021-06-15 |
| 10910244 | Methods and system for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2021-02-02 |
| 10816901 | Coater with automatic cleaning function and coater automatic cleaning method | Hui Wang, Fuping Chen, Wenjun Wang, Hongchao Yang, Voha Nuch +3 more | 2020-10-27 |
| 10770335 | Substrate supporting apparatus | Zhiyou Fang, Jun Wu, Hui Wang, Fuping Chen, Wenjun Wang | 2020-09-08 |
| 8671961 | Methods and apparatus for cleaning semiconductor wafers | Voha Nuch, David Xuan-Qi Wang, Yue Ma, Jian Wang, Yunwen Huang +2 more | 2014-03-18 |
| 8580042 | Methods and apparatus for cleaning semiconductor wafers | Voha Nuch, David Xuan-Qi Wang, Yue Ma, Jian Wang, Yunwen Huang +2 more | 2013-11-12 |
| 6660135 | Staged aluminum deposition process for filling vias | Sang Ho Yu, Yonghwa Chris Cha, Murali Abburi, Shri Singhvi | 2003-12-09 |
| 6436820 | Method for the CVD deposition of a low residual halogen content multi-layered titanium nitride film having a combined thickness greater than 1000 å | Jianhua Hu, Yin Lin, Yehuda Demayo, Ming Xi | 2002-08-20 |
| 6364949 | 300 mm CVD chamber design for metal-organic thin film deposition | David T. Or, Keith Kuang-Kuo Koai, Lawrence Chung-Lai Lei | 2002-04-02 |
| 6352620 | Staged aluminum deposition process for filling vias | Sang Ho Yu, Yonghwa Chris Cha, Murali Abburi, Shri Singhvi | 2002-03-05 |
| 6332601 | Liquid vaporizers for semiconductor processing systems | Joel M. Huston | 2001-12-25 |
| 6220091 | Liquid level pressure sensor and method | Yu-Chia Chang, Gwo-Chuan Tzu | 2001-04-24 |
| 6221174 | Method of performing titanium/titanium nitride integration | Yin Lin, Jianhua Hu, Frederick Wu, Ming Xi, Li Wu | 2001-04-24 |