Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670515 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao, Lei Wu | 2023-06-06 |
| 11515168 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao | 2022-11-29 |
| 11373843 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao, Lei Wu | 2022-06-28 |
| 10020208 | Methods and apparatus for cleaning semiconductor wafers | Jian Wang, Sunny Voha Nuch, Liangzhi Xie, Junping Wu, Zhaowei Jia +2 more | 2018-07-10 |
| 9633833 | Methods and apparatus for cleaning semiconductor wafers | Jian Wang, Sunny Voha Nuch, Liangzhi Xie, Junping Wu, Zhaowei Jia +3 more | 2017-04-25 |
| 9595457 | Methods and apparatus for cleaning semiconductor wafers | Jian Wang, Sunny Voha Nuch, Liangzhi Xie, Junping Wu, Zhaowei Jia +2 more | 2017-03-14 |
| 9492852 | Methods and apparatus for cleaning semiconductor wafers | Jian Wang, Sunny Voha Nuch, Liangzhi Xie, Junping Wu, Zhaowei Jia +3 more | 2016-11-15 |
| 8671961 | Methods and apparatus for cleaning semiconductor wafers | Voha Nuch, David Xuan-Qi Wang, Yue Ma, Fufa Chen, Jian Wang +2 more | 2014-03-18 |
| 8580042 | Methods and apparatus for cleaning semiconductor wafers | Voha Nuch, David Xuan-Qi Wang, Yue Ma, Fufa Chen, Jian Wang +2 more | 2013-11-12 |
| 8518224 | Plating apparatus for metallization on semiconductor workpiece | Yue Ma, Xi Wang, Zhenxu Pang, Voha Nuch, David Xuan-Qi Wang | 2013-08-27 |