Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068149 | Apparatus and method for cleaning semiconductor wafers | Hui Wang, Jun Wu, Guanzhong Lu, Fuping Chen, Jian Wang +2 more | 2024-08-20 |
| 11854842 | Substrate heat treatment apparatus | Hui Wang, Hongchao Yang, Jun Wu, Wenjun Wang, Fuping Chen | 2023-12-26 |
| 10770335 | Substrate supporting apparatus | Fufa Chen, Jun Wu, Hui Wang, Fuping Chen, Wenjun Wang | 2020-09-08 |