Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436820 | Method for the CVD deposition of a low residual halogen content multi-layered titanium nitride film having a combined thickness greater than 1000 å | Jianhua Hu, Fufa Chen, Yehuda Demayo, Ming Xi | 2002-08-20 |
| 6221174 | Method of performing titanium/titanium nitride integration | Fufa Chen, Jianhua Hu, Frederick Wu, Ming Xi, Li Wu | 2001-04-24 |