Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Formation of composite tungsten films

Formation of composite tungsten films

US Patent 6939804 · Granted Sep 6, 2005

Estimated economic value: $20,356,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for enhancing selectivity of titanium and titanium silicid2025
Electrical contact cavity structure and methods of forming the same2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Method and apparatus for low temperature selective epitaxy in a deep trench2025
Process kit for a substrate support2025
Method of depositing metal films2025
Dual silicide process using ruthenium silicide2024
Image interaction using sound signals2024
Selective cobalt deposition on copper surfaces2024
Low temperature deposition of iridium containing films2024
Low temperature deposition of iridium containing films2024
Methods for depositing fluorine/carbon-free conformal tungsten2024