Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850973 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Michael Julian Daneman, Martin Lim, Igor Tchertkov | 2020-12-01 |
| 10532926 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Michael Julian Daneman, Martin Lim, Igor Tchertkov | 2020-01-14 |
| 10442680 | Electric connection flexures | Xiaolei Liu, Guiqin Wang, Matthew Ng, Benson Mai, Changgeng Liu | 2019-10-15 |
| 9540230 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Michael Julian Daneman, Martin Lim, Igor Tchertkov | 2017-01-10 |
| 9221676 | Internal electrical contact for enclosed MEMS devices | Jongwoo Shin, Martin Lim, Michael Julian Daneman, Joseph Seeger | 2015-12-29 |
| 8945969 | Internal electrical contact for enclosed MEMS devices | Jongwoo Shin, Martin Lim, Michael Julian Daneman, Joseph Seeger | 2015-02-03 |
| 8822252 | Internal electrical contact for enclosed MEMS devices | Jongwoo Shin, Martin Lim, Michael Julian Daneman, Joseph Seeger | 2014-09-02 |
| 8564076 | Internal electrical contact for enclosed MEMS devices | Jongwoo Shin, Martin Lim, Michael Julian Daneman, Joseph Seeger | 2013-10-22 |
| 8513747 | Integrated MEMS devices with controlled pressure environments by means of enclosed volumes | Martin Lim, Steven S. Nasiri | 2013-08-20 |
| 8350346 | Integrated MEMS devices with controlled pressure environments by means of enclosed volumes | Martin Lim, Steven S. Nasiri | 2013-01-08 |
| 7923789 | Method of fabricating reflective spatial light modulator having high contrast ratio | Xiao Yang, Dongmin Chen | 2011-04-12 |
| 7911678 | Reflective spatial light modulator having dual layer electrodes and method of fabricating same | — | 2011-03-22 |
| 7723228 | Reduction of hillocks prior to dielectric barrier deposition in Cu damascene | Nagarajan Rajagopalan, Meiyee Shek, Bok Hoen Kim, Hichem M'Saad, Thomas Nowak | 2010-05-25 |
| 7678288 | Method and structure for manufacturing bonded substrates using multiple photolithography tools | Xiao Yang, Yuxiang Wang, Howard Woo | 2010-03-16 |
| 7670880 | Method and structure for forming an integrated spatial light modulator | Xiao Yang, Dongmin Chen | 2010-03-02 |
| 7666319 | Semiconductor etching process to release single crystal silicon mirrors | — | 2010-02-23 |
| 7477440 | Reflective spatial light modulator having dual layer electrodes and method of fabricating same | — | 2009-01-13 |
| 7374962 | Method of fabricating reflective spatial light modulator having high contrast ratio | Xiao Yang, Dongmin Chen | 2008-05-20 |
| 7371427 | Reduction of hillocks prior to dielectric barrier deposition in Cu damascene | Nagarajan Rajagopalan, Meiyee Shek, Bok Hoen Kim, Hichem M'Saad, Thomas Nowak | 2008-05-13 |
| 6794311 | Method and apparatus for treating low k dielectric layers to reduce diffusion | Judy H. Huang, Ping Xu | 2004-09-21 |
| 6566183 | Method of making a transistor, in particular spacers of the transistor | Steven Chen, Lee Luo, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen | 2003-05-20 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Shulin Wang, Lee Luo, Sang-Hoon Ahn | 2003-05-06 |