Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410090 | Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films | — | 2002-06-25 |
| 6365495 | Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature | Huan Luo, Keith Kuang-Kuo Koai, Ming Xi, Mei Chang, Russell C. Ellwanger | 2002-04-02 |
| 6326690 | Method of titanium/titanium nitride integration | Ming Xi, Zvi Lando, Mei Chang | 2001-12-04 |
| 6214714 | Method of titanium/titanium nitride integration | Ming Xi, Zvi Lando, Mei Chang | 2001-04-10 |
| 5863598 | Method of forming doped silicon in high aspect ratio openings | Mahalingam Venkatesan, Vedapuram S. Achutharaman | 1999-01-26 |