Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892941 | Multi-zone resistive heater | Anqing Cui, Alexander Tam, Jacob Smith, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more | 2018-02-13 |
| 9312154 | CVD apparatus for improved film thickness non-uniformity and particle performance | Anqing Cui, Bernard L. Hwang, Son T. Nguyen, Anh N. Nguyen, Sean M. Seutter +1 more | 2016-04-12 |
| 8815340 | Thin film deposition method | Guillaume Bignon, Nicolas Nadaud, Se-Jong Kim | 2014-08-26 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Shulin Wang, Alexander Tam, Errol Antonio C. Sanchez +2 more | 2003-06-24 |