Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11932939 | Lids and lid assembly kits for atomic layer deposition chambers | Muhammad M. Rasheed, Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang +1 more | 2024-03-19 |
| 11600476 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Ashish Goel, Hanbing Wu, Prashanth Kothnur, Chi Hong Ching | 2023-03-07 |
| 11515218 | Thermal profile monitoring wafer and methods of monitoring temperature | — | 2022-11-29 |
| 11384432 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Muhammad M. Rasheed, Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang +1 more | 2022-07-12 |
| 11183375 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Ashish Goel, Hanbing Wu, Prashanth Kothnur, Chi Hong Ching | 2021-11-23 |
| 11043364 | Process kit for multi-cathode processing chamber | Hanbing Wu, Anantha K. Subramani, Ashish Goel, Rongjun Wang, Chi Hong Ching | 2021-06-22 |
| 10651095 | Thermal profile monitoring wafer and methods of monitoring temperature | — | 2020-05-12 |
| 9879341 | Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials | Kaushal K. Singh, Ashutosh Agarwal, Ashish Goel, Vijay Parihar, Er-Xuan Ping +1 more | 2018-01-30 |