Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lids and lid assembly kits for atomic layer deposition chambers

Lids and lid assembly kits for atomic layer deposition chambers

US Patent 11932939 · Granted Mar 19, 2024

Estimated economic value: $54,086,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Conformal molybdenum deposition2025
Method of tuning film properties of metal nitride using plasma2025
Low resistivity metal contact stack2025
Pharmaceutical composition comprising tetrofosmin and pharmaceutically acceptabl2025
Methods and apparatus for seam reduction or elimination2025
Seamless gapfill of metal nitrides2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025
Nucleation-free gap fill ALD process2025
Thermal process chamber lid with backside pumping2025
One chamber multi-station selective metal removal2025
Gas mixer2025
Deposition of conformal and gap-fill amorphous silicon thin-films2025