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Jie Bai, Juanjuan Huang |
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Daejoong Won, Soonbyung Park |
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Manufacturing method of a memory and a memory |
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2023-12-26 |
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Multi-layer stacks for 3D NAND extendability |
Xinhai Han, Deenesh Padhi, Srinivas Guggilla |
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Ellie Yieh, Ludovic Godet, Srinivas D. Nemani, Gary E. Dickerson |
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PVD deposition and anneal of multi-layer metal-dielectric film |
Minrui Yu, Kai Ma, Thomas Jongwan Kwon, Kaushal K. Singh |
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Multi-layer stacks for 3D NAND extendibility |
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Self-aligned nanodots for 3D NAND flash memory |
Sungwon Jun, Saurabh Chopra, Thomas Jongwan Kwon |
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Hybrid carbon hardmask for lateral hardmask recess reduction |
Thomas Jongwan Kwon, Rui Cheng, Abhijit Basu Mallick, Jaesoo Ahn |
2019-09-10 |
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Hybrid carbon hardmask for lateral hardmask recess reduction |
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