Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347695 | Methods for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2025-07-01 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Xianmin Tang, Lu Chen | 2025-03-04 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Feng Chen, Carmen Leal Cervantes, Yong Jin Kim +4 more | 2025-01-28 |
| 12157943 | Methods of selective deposition | Wenjing Xu, Gang Shen, Yufei Hu, Feng Chen | 2024-12-03 |
| 11948836 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Xianmin Tang +1 more | 2024-04-02 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu +4 more | 2024-03-26 |
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Feng Chen, Xianmin Tang, Lu Chen, Zhiyuan Wu | 2023-10-10 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Feng Chen, Xianmin Tang, Lu Chen, Zhiyuan Wu | 2023-09-19 |
| 11672132 | Variable resistance memory device | Jae-Rok Kahng | 2023-06-06 |
| 11587873 | Binary metal liner layers | Gang Shen, Feng Chen, Yizhak Sabba, Xianmin Tang, Zhiyuan Wu +1 more | 2023-02-21 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Xuesong Lu, Xianmin Tang, Andrew Nguyen, Tza-Jing Gung +4 more | 2023-01-24 |
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Feng Chen, Rui Li +2 more | 2022-12-13 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2022-08-23 |
| 11417568 | Methods for selective deposition of tungsten atop a dielectric layer for bottom up gapfill | Wei Lei, Yi Xu, Yu Lei, Raymond Hung, Shirish A. PETHE | 2022-08-16 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Xianmin Tang, Lu Chen | 2022-08-09 |
| 11270911 | Doping of metal barrier layers | Lu Chen, Christina L. Engler, Gang Shen, Feng Chen, Xianmin Tang | 2022-03-08 |
| 11171045 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Xianmin Tang +1 more | 2021-11-09 |
| 11171046 | Methods for forming cobalt and ruthenium capping layers for interconnect structures | Feng Chen, Yufei Hu, Wenjing Xu, Gang Shen, Zhiyuan Wu | 2021-11-09 |
| 10892186 | Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect | Ben-Li Sheu, Feng Q. Liu, Mei Chang, Shirish A. PETHE | 2021-01-12 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2020-07-14 |
| 10633056 | Bicycle with automatic transmission | Min Soo Ha, Jinsu Ha | 2020-04-28 |
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2018-12-18 |
| 10014179 | Methods for forming cobalt-copper selective fill for an interconnect | Rong Tao, Xianmin Tang, Joung Joo Lee | 2018-07-03 |
| 10002834 | Method and apparatus for protecting metal interconnect from halogen based precursors | Mehul Naik, Paul F. Ma, Srinivas Guggilla | 2018-06-19 |
| 9938622 | Method to deposit CVD ruthenium | Sang Ho Yu, KieJin Park | 2018-04-10 |