Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D998575 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Fuhong Zhang, Kishor Kalathiparambil | 2023-09-12 |
| D997111 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Fuhong Zhang, Kishor Kalathiparambil | 2023-08-29 |
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Fuhong Zhang, Gang Shen, Feng Chen, Rui Li, Xiangjin Xie +2 more | 2022-12-13 |
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Preetham Rao, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil +1 more | 2022-11-08 |
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo +2 more | 2022-04-26 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Adolph Miller Allen +1 more | 2022-03-29 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Kishor Kalathiparambil, Xiangjin Xie +1 more | 2022-01-11 |
| 11152608 | Modified silicon particle electrodes and methods | Lorenzo Mangolini | 2021-10-19 |
| D859333 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Fuhong Zhang, Zheng Wang | 2019-09-10 |
| D858468 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Fuhong Zhang, Zheng Wang | 2019-09-03 |
| 10084184 | Conformal coating of nano-porous material with group IV semiconductor using nanoparticle ink | Lorenzo Mangolini | 2018-09-25 |