Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11757074 | Light-emitting diode display pixels with microlens stacks over light-emitting diodes | Jaein Choi, Joy M. Johnson, Lai Wang, Hairong Tang, Steven Molesa +2 more | 2023-09-12 |
| 11587829 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2023-02-21 |
| 10910263 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2021-02-02 |
| 10892186 | Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect | Feng Q. Liu, Tae Hong Ha, Mei Chang, Shirish A. PETHE | 2021-01-12 |
| 10847463 | Seed layers for copper interconnects | Zhiyuan Wu, Meng Chu Tseng, Mehul Naik | 2020-11-24 |
| 10665542 | Cobalt manganese vapor phase deposition | Sang Ho Yu, Paul F. Ma, Jiang Lu | 2020-05-26 |
| 10636655 | Methods for asymmetric deposition of metal on high aspect ratio nanostructures | Bencherki Mebarki, Joung Joo Lee, Ismail Emesh, Roey Shaviv, Xianmin Tang | 2020-04-28 |
| 10431493 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2019-10-01 |
| 10283352 | Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use | Feng Q. Liu, David Knapp, David Thompson | 2019-05-07 |
| 10008412 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2018-06-26 |
| 9953926 | Methods of depositing cobalt manganese films | Sang Ho Yu, Paul F. Ma, Jiang Lu | 2018-04-24 |
| 9916975 | Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use | Feng Q. Liu, David Knapp, David Thompson | 2018-03-13 |
| 9659814 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2017-05-23 |
| 8470126 | Wiggling control for pseudo-hardmask | Rajinder Dhindsa, Vinay Pohray, Eric A. Hudson, Andrew D. Bailey, III | 2013-06-25 |
| 8329585 | Method for reducing line width roughness with plasma pre-etch treatment on photoresist | Martin Shim, Jonathan Kim | 2012-12-11 |
| 8304262 | Wiggling control for pseudo-hardmask | Rajinder Dhindsa, Vinay Pohray, Eric A. Hudson, Andrew D. Bailey, III | 2012-11-06 |