| 12469715 |
Dry etching with etch byproduct self-cleaning |
Zhaohui George Yao, Qianyan Fu, Mark Saly, Yang Yang, Jeffrey W. Anthis +1 more |
2025-11-11 |
|
| 12315733 |
Enhanced etch selectivity using halides |
Feng Qiao, Hailong Zhou, Junkai He, Qian Fu, Mark Saly +2 more |
2025-05-27 |
|
| 12272531 |
Dual pressure oxidation method for forming an oxide layer in a feature |
Christopher S. Olsen, Rene George, Tsung-Han Yang, Lara Hawrylchak |
2025-04-08 |
|
| 11970512 |
Amphotericin B derivatives with improved therapeutic index |
Martin D. Burke, Stephen Thomas Davis, Brice E. Uno, Justin Struble, Ian Dailey +3 more |
2024-04-30 |
|
| 11933942 |
Non-line-of-sight deposition of coating on internal components of assembled device |
Alexander Berger, Cheng-Hsuan Chou |
2024-03-19 |
$54,086,000 |
| 11117920 |
Amphotericin B derivatives with improved therapeutic index |
Martin D. Burke, Stephen Thomas Davis, Brice E. Uno, Justin Struble, Ian Dailey +3 more |
2021-09-14 |
|
| 11028114 |
Amphotericin B derivatives with improved therapeutic index |
Martin D. Burke, Stephen Thomas Davis, Brice E. Uno, Justin Struble, Ian Dailey +3 more |
2021-06-08 |
|
| 10483116 |
Methods of depositing metal films using metal oxyhalide precursors |
Xinyu Fu, David Thompson, Jeffrey W. Anthis, Mei Chang |
2019-11-19 |
$24,323,000 |
| 10323057 |
Amphotericin B derivatives with improved therapeutic index |
Martin D. Burke, Stephen Thomas Davis, Brice E. Uno, Justin Struble, Ian Dailey +3 more |
2019-06-18 |
|
| 10283352 |
Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use |
Feng Q. Liu, Ben-Li Sheu, David Thompson |
2019-05-07 |
$13,988,000 |
| 10121671 |
Methods of depositing metal films using metal oxyhalide precursors |
Xinyu Fu, David Thompson, Jeffrey W. Anthis, Mei Chang |
2018-11-06 |
$24,517,000 |
| 10115593 |
Chemical modification of hardmask films for enhanced etching and selective removal |
Simon Huang, Jeffrey W. Anthis, Philip Alan Kraus, David Thompson |
2018-10-30 |
$15,195,000 |
| 9982345 |
Deposition of metal films using beta-hydrogen free precursors |
David Thompson, Jeffrey W. Anthis |
2018-05-29 |
$37,048,000 |
| 9922872 |
Tungsten films by organometallic or silane pre-treatment of substrate |
Jeffrey W. Anthis, Xinyu Fu, Srinivas Gandikota |
2018-03-20 |
$37,605,000 |
| 9916975 |
Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use |
Feng Q. Liu, Ben-Li Sheu, David Thompson |
2018-03-13 |
$33,804,000 |
| 9908900 |
Methods for forming protected organoboronic acids |
Martin D. Burke, Graham R. Dick, Eric P. Gillis, Jenna A. Klubnick |
2018-03-06 |
|
| 9870915 |
Chemical modification of hardmask films for enhanced etching and selective removal |
Simon Huang, Jeffrey W. Anthis, Philip Alan Kraus, David Thompson |
2018-01-16 |
$25,242,000 |
| 9845317 |
Slow release of organoboronic acids in cross-coupling reactions |
Martin D. Burke, Eric P. Gillis |
2017-12-19 |
|
| 9449843 |
Selectively etching metals and metal nitrides conformally |
Mikhail Korolik, Nitin K. Ingle, David Thompson, Jeffrey W. Anthis, Benjamin Schmiege |
2016-09-20 |
$12,933,000 |
| 9353131 |
Methods for forming protected organoboronic acids |
Martin D. Burke, Graham R. Dick, Eric P. Gillis, Jenna A. Klubnick |
2016-05-31 |
|
| 9328102 |
Slow release of organoboronic acids in cross-coupling reactions |
Martin D. Burke, Eric P. Gillis |
2016-05-03 |
|
| 9194040 |
Methods for producing nickel-containing films |
— |
2015-11-24 |
$16,048,000 |
| 9196474 |
Metal amide deposition precursors and their stabilization with an inert ampoule liner |
David Thompson |
2015-11-24 |
$16,048,000 |
| 9006463 |
Slow release of organoboronic acids in cross-coupling reactions |
Martin D. Burke, Eric P. Gillis |
2015-04-14 |
|
| 9005704 |
Methods for depositing films comprising cobalt and cobalt nitrides |
David Thompson, Jeffrey W. Anthis, Benjamin Schmiege |
2015-04-14 |
$19,339,000 |
