| 11094544 |
Methods of forming self-aligned vias |
David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more |
2021-08-17 |
$63,158,000 |
| 10906925 |
Ruthenium precursors for ALD and CVD thin film deposition and uses thereof |
Jeffrey W. Anthis, David Thompson |
2021-02-02 |
$74,085,000 |
| 10760159 |
Methods and apparatus for depositing yttrium-containing films |
Lakmal C. Kalutarage, Mark Saly, Thomas Knisley, David Thompson |
2020-09-01 |
$30,946,000 |
| 10643840 |
Selective deposition defects removal by chemical etch |
Jeffrey W. Anthis, Chang Ke, Pratham Jain, Guoqiang Jian, Michael S. Jackson +3 more |
2020-05-05 |
$58,379,000 |
| 10643838 |
In-situ formation of non-volatile lanthanide thin film precursors and use in ALD and CVD |
Jeffrey W. Anthis, David Thompson |
2020-05-05 |
$58,379,000 |
| 10633743 |
System and method for controllable non-volatile metal removal |
Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist |
2020-04-28 |
|
| 10577386 |
Ruthenium precursors for ALD and CVD thin film deposition and uses thereof |
Jeffrey W. Anthis, David Thompson |
2020-03-03 |
$21,905,000 |
| 10465294 |
Oxide and metal removal |
Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis |
2019-11-05 |
$21,874,000 |
| 10410865 |
Methods of forming self-aligned vias |
David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more |
2019-09-10 |
$15,043,000 |
| 10323054 |
Precursors for deposition of metal, metal nitride and metal oxide based films of transition metals |
Jeffrey W. Anthis, David Thompson |
2019-06-18 |
$21,126,000 |
| 10297462 |
Methods of etching films comprising transition metals |
Jeffrey W. Anthis, David Thompson |
2019-05-21 |
$30,257,000 |
| 10242885 |
Selective dry etching of metal films comprising multiple metal oxides |
Jeffrey W. Anthis, David Thompson |
2019-03-26 |
$22,929,000 |
| 10233547 |
Methods of etching films with reduced surface roughness |
Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more |
2019-03-19 |
$17,059,000 |
| 10083834 |
Methods of forming self-aligned vias |
David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan |
2018-09-25 |
$34,271,000 |
| 10000853 |
System and method for controllable non-volatile metal removal |
Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist |
2018-06-19 |
|
| 9896770 |
Methods of etching films with reduced surface roughness |
Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more |
2018-02-20 |
$63,276,000 |
| 9881787 |
Deposition methods for uniform and conformal hybrid titanium oxide films |
Chien-Teh Kao, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei, Yung-Hsin Lee +7 more |
2018-01-30 |
$26,789,000 |
| 9799533 |
Methods of etching films comprising transition metals |
Jeffrey W. Anthis, David Thompson |
2017-10-24 |
$27,129,000 |
| 9611552 |
System and method for controllable non-volatile metal removal |
Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist |
2017-04-04 |
|
| 9540736 |
Methods of etching films with reduced surface roughness |
Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more |
2017-01-10 |
$27,103,000 |
| 9528183 |
Cobalt removal for chamber clean or pre-clean process |
Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope +1 more |
2016-12-27 |
$14,994,000 |
| 9514933 |
Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition |
Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju +1 more |
2016-12-06 |
$23,225,000 |
| 9449843 |
Selectively etching metals and metal nitrides conformally |
Mikhail Korolik, Nitin K. Ingle, David Thompson, Jeffrey W. Anthis, David Knapp |
2016-09-20 |
$12,933,000 |
| 9390940 |
Methods of etching films comprising transition metals |
Jeffrey W. Anthis, David Thompson |
2016-07-12 |
$13,832,000 |
| 9309598 |
Oxide and metal removal |
Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis |
2016-04-12 |
$12,337,000 |
