Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094544 | Methods of forming self-aligned vias | David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2021-08-17 |
| 10906925 | Ruthenium precursors for ALD and CVD thin film deposition and uses thereof | Jeffrey W. Anthis, David Thompson | 2021-02-02 |
| 10760159 | Methods and apparatus for depositing yttrium-containing films | Lakmal C. Kalutarage, Mark Saly, Thomas Knisley, David Thompson | 2020-09-01 |
| 10643840 | Selective deposition defects removal by chemical etch | Jeffrey W. Anthis, Chang Ke, Pratham Jain, Guoqiang Jian, Michael S. Jackson +3 more | 2020-05-05 |
| 10643838 | In-situ formation of non-volatile lanthanide thin film precursors and use in ALD and CVD | Jeffrey W. Anthis, David Thompson | 2020-05-05 |
| 10633743 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist | 2020-04-28 |
| 10577386 | Ruthenium precursors for ALD and CVD thin film deposition and uses thereof | Jeffrey W. Anthis, David Thompson | 2020-03-03 |
| 10465294 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis | 2019-11-05 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2019-09-10 |
| 10323054 | Precursors for deposition of metal, metal nitride and metal oxide based films of transition metals | Jeffrey W. Anthis, David Thompson | 2019-06-18 |
| 10297462 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2019-05-21 |
| 10242885 | Selective dry etching of metal films comprising multiple metal oxides | Jeffrey W. Anthis, David Thompson | 2019-03-26 |
| 10233547 | Methods of etching films with reduced surface roughness | Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more | 2019-03-19 |
| 10083834 | Methods of forming self-aligned vias | David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan | 2018-09-25 |
| 10000853 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist | 2018-06-19 |
| 9896770 | Methods of etching films with reduced surface roughness | Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more | 2018-02-20 |
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei, Yung-Hsin Lee +7 more | 2018-01-30 |
| 9799533 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2017-10-24 |
| 9611552 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist | 2017-04-04 |
| 9540736 | Methods of etching films with reduced surface roughness | Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more | 2017-01-10 |
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope +1 more | 2016-12-27 |
| 9514933 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju +1 more | 2016-12-06 |
| 9449843 | Selectively etching metals and metal nitrides conformally | Mikhail Korolik, Nitin K. Ingle, David Thompson, Jeffrey W. Anthis, David Knapp | 2016-09-20 |
| 9390940 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2016-07-12 |
| 9309598 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis | 2016-04-12 |