Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351910 | Hafnium aluminum oxide coatings deposited by atomic layer deposition | David Fenwick, Jennifer Y. Sun, Xiao-Ming He | 2025-07-08 |
| 11933942 | Non-line-of-sight deposition of coating on internal components of assembled device | Alexander Berger, David Knapp | 2024-03-19 |
| 11401599 | Erosion resistant metal silicate coatings | Xiao-Ming He, Jennifer Y. Sun | 2022-08-02 |
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiaowei Wu +2 more | 2020-08-25 |