Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020183 | Edge roughness reduction | Yansha Jin, Zhongkui Tan, Lin Cui, Qian Fu | 2018-07-10 |
| 8329585 | Method for reducing line width roughness with plasma pre-etch treatment on photoresist | Ben-Li Sheu, Jonathan Kim | 2012-12-11 |