Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252779 | Methods for in-situ chamber monitoring | Xiangjin Xie | 2025-03-18 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Feng Chen, Yong Jin Kim, Kevin Kashefi +4 more | 2025-01-28 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Feng Chen, Lu Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |
| 11756784 | Methods for aluminum oxide surface recovery | Alexander Jansen, Xiangjin Xie | 2023-09-12 |
| 11443936 | Methods and apparatus for aluminum oxide surface recovery | Alexander Jansen, Xiangjin Xie | 2022-09-13 |