| 12394670 |
Nucleation-free gap fill ALD process |
Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu +1 more |
2025-08-19 |
| 12381086 |
Low temperature graphene growth |
Jialiang Wang, Abhijit Basu Mallick, Nitin K. Ingle |
2025-08-05 |
| 12300491 |
Deposition of semiconductor integration films |
Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan +3 more |
2025-05-13 |
| 12288717 |
Metal based hydrogen barrier |
Srinivas Gandikota, Steven C. H. Hung, Srinivas D. Nemani, Yixiong Yang, Nikolaos Bekiaris |
2025-04-29 |
| 12198936 |
Defect free germanium oxide gap fill |
Huiyuan Wang, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick |
2025-01-14 |
| 12084764 |
Vapor phase photoresists deposition |
Lakmal C. Kalutarage, Aaron Dangerfield, Mark Saly, David Thompson, Regina Freed |
2024-09-10 |
| 12020982 |
Metal based hydrogen barrier |
Srinivas Gandikota, Steven C. H. Hung, Srinivas D. Nemani, Yixiong Yang, Nikolaos Bekiaris |
2024-06-25 |
| 11990369 |
Selective patterning with molecular layer deposition |
Bhaskar Jyoti Bhuyan, Zeqing Shen, Abhijit Basu Mallick |
2024-05-21 |
| 11972940 |
Area selective carbon-based film deposition |
Xinke Wang, Bhaskar Jyoti Bhuyan, Zeqing Shen, Abhijit Basu Mallick, Jiecong Tang +2 more |
2024-04-30 |
| 11886120 |
Deposition of semiconductor integration films |
Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan +3 more |
2024-01-30 |
| 11830734 |
Thermal deposition of silicon-germanium |
Huiyuan Wang, Abhijit Basu Mallick |
2023-11-28 |
| 11817320 |
CVD based oxide-metal multi structure for 3D NAND memory devices |
Kelvin Chan, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick, Srinivas Gandikota +1 more |
2023-11-14 |
| 11791155 |
Diffusion barriers for germanium |
Huiyuan Wang, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle |
2023-10-17 |
| 11756785 |
Molecular layer deposition contact landing protection for 3D NAND |
Bhaskar Jyoti Bhuyan, Zeqing Shen, Abhijit Basu Mallick |
2023-09-12 |
| 11705335 |
Conformal high concentration boron doping of semiconductors |
Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Rui Cheng, Gaurav Thareja +2 more |
2023-07-18 |
| 11562904 |
Deposition of semiconductor integration films |
Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan +3 more |
2023-01-24 |
| 11545504 |
Methods and apparatus for three dimensional NAND structure fabrication |
Takehito Koshizawa, Mukund Srinivasan, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang +1 more |
2023-01-03 |
| 11515163 |
Low temperature graphene growth |
Jialiang Wang, Abhijit Basu Mallick, Nitin K. Ingle |
2022-11-29 |
| 11430801 |
Methods and apparatus for three dimensional NAND structure fabrication |
Takehito Koshizawa, Mukund Srinivasan, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang +1 more |
2022-08-30 |
| 10998329 |
Methods and apparatus for three dimensional NAND structure fabrication |
Takehito Koshizawa, Mukund Srinivasan, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang +1 more |
2021-05-04 |
| 10410869 |
CVD based oxide-metal multi structure for 3D NAND memory devices |
Kelvin Chan, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick, Srinivas Gandikota +1 more |
2019-09-10 |
