Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394670 | Nucleation-free gap fill ALD process | Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu, Susmit Singha Roy +1 more | 2025-08-19 |
| D1086426 | Handheld fan | — | 2025-07-29 |
| 12325910 | Deposition of conformal and gap-fill amorphous silicon thin-films | Rui Cheng, Pramit Manna, Kelvin Chan, Karthik Janakiraman, Abhijit Basu Mallick +1 more | 2025-06-10 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2024-01-30 |
| 11875515 | Method for morphology identification, trajectory tracking and velocity measurement of high-concentration microbubbles | Qingqing Ye, Weiqi Sun, Xueming Shao | 2024-01-16 |
| 11702742 | Methods of forming nucleation layers with halogenated silanes | Kelvin Chan | 2023-07-18 |
| 11289374 | Nucleation-free gap fill ALD process | Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu, Susmit Singha Roy +1 more | 2022-03-29 |
| 11244824 | Conformal doped amorphous silicon as nucleation layer for metal deposition | Rui Cheng, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota | 2022-02-08 |
| 11174551 | Methods for depositing tungsten on halosilane based metal silicide nucleation layers | Kelvin Chan | 2021-11-16 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 |
| 11066743 | Selective atomic layer deposition of ruthenium | Yong Wu, Srinivas Gandikota, Abhijit Basu Mallick | 2021-07-20 |
| 11069568 | Ultra-thin diffusion barriers | Susmit Singha Roy, Abhijit Basu Mallick, Srinivas Gandikota | 2021-07-20 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Ziqing Duan, Abhijit Basu Mallick, Kelvin Chan | 2021-01-05 |
| 10854511 | Methods of lowering wordline resistance | Yong Wu, Chia Cheng Chin, Xinliang Lu, Srinivas Gandikota, Ziqing Duan +1 more | 2020-12-01 |
| 10854461 | Tungsten deposition without barrier layer | Yong Wu, Chia Cheng Chin, Srinivas Gandikota, Kelvin Chan | 2020-12-01 |
| 10790141 | Surface-selective atomic layer deposition using hydrosilylation passivation | Kelvin Chan, Abhijit Basu Mallick | 2020-09-29 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Pramit Manna, Ziqing Duan, Rui Cheng, Shishi Jiang | 2020-09-22 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2020-08-11 |
| 10636659 | Selective deposition for simplified process flow of pillar formation | Ziqing Duan, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota | 2020-04-28 |
| 10636669 | Seam healing using high pressure anneal | Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Shishi Jiang, Yong Wu +2 more | 2020-04-28 |
| 10622251 | Methods for wordline separation in 3D-NAND devices | Ziqing Duan, Abhijit Basu Mallick, Kelvin Chan | 2020-04-14 |
| 10615050 | Methods for gapfill in high aspect ratio structures | Rui Cheng, Abhijit Basu Mallick, Pramit Manna | 2020-04-07 |
| 10600684 | Ultra-thin diffusion barriers | Susmit Singha Roy, Abhijit Basu Mallick, Srinivas Gandikota | 2020-03-24 |
| 10559497 | Seamless tungsten fill by tungsten oxidation-reduction | Yong Wu, Shishi Jiang, Ziqing Duan, Abhijit Basu Mallick, Srinivas Gandikota | 2020-02-11 |