Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412759 | Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus | Gijsbert Hendrik Ronner, Christianus G.M. de Ridder, Klaas P. Boonstra, Jeroen de Jonge, Lucian Jdira +1 more | 2025-09-09 |
| 12366410 | Apparatus for processing a plurality of substrates provided with an extractor chamber | Adriaan Garssen, Herbert Terhorst, Lucian Jdira | 2025-07-22 |
| 12288710 | Wafer processing apparatus with a rotatable table | Aniket PATIL, Nimit Kothari | 2025-04-29 |
| 12243757 | Flange and apparatus for processing substrates | Jeroen de Jonge, Sumit Sachdeva, Lucian Jdira, Julien Laurentius Antonius Maria Keijser | 2025-03-04 |
| 12237195 | Cassette lid opening device | Maarten Hendrikus Maria Lamers, Nimit Kothari, Chaggai Shmuel Ganani | 2025-02-25 |
| 12203166 | Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals | Amit Mishra, Bhushan Zope, Shankar Swaminathan | 2025-01-21 |
| 12183602 | Substrate processing apparatus for processing substrates | Chris G. M. de Ridder | 2024-12-31 |
| 12077854 | Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas | Dieter Pierreux, Herbert Terhorst, Lucian Jdira, Bert Jongbloed | 2024-09-03 |
| 12027400 | Automatic system calibration for wafer handling | — | 2024-07-02 |
| 11993847 | Injector | Chris G. M. de Ridder, Klaas P. Boonstra | 2024-05-28 |
| 11971217 | Batch furnace assembly and method of operating a batch furnace assembly | Lucian Jdira, Herbert Terhorst | 2024-04-30 |
| 11869786 | Wafer boat | Chaggai Shmuel Ganani | 2024-01-09 |
| 11804388 | Substrate processing apparatus and method | — | 2023-10-31 |
| 11798830 | Fast FOUP swapping with a FOUP handler | Jeroen Fluit | 2023-10-24 |
| 11735445 | Substrate processing apparatus for processing substrates | Chris G. M. de Ridder | 2023-08-22 |
| 11587815 | Vertical batch furnace assembly | Chris G. M. de Ridder | 2023-02-21 |
| 11515187 | Fast FOUP swapping with a FOUP handler | Jeroen Fluit | 2022-11-29 |
| 11515188 | Wafer boat handling device, vertical batch furnace and method | Christianus G.M. de Ridder | 2022-11-29 |
| 11230766 | Substrate processing apparatus and method | Dieter Pierreux, Cornelis Thaddeus Herbschleb, Werner Knaepen, Bert Jongbloed, Steven R. A. Van Aerde +3 more | 2022-01-25 |
| 11232963 | Substrate processing apparatus and method | — | 2022-01-25 |
| 11121014 | Dummy wafer storage cassette | Chris G. M. de Ridder, Adriaan Garssen | 2021-09-14 |
| 11087997 | Substrate processing apparatus for processing substrates | Chris G. M. de Ridder | 2021-08-10 |
| 11024523 | Substrate processing apparatus and method | — | 2021-06-01 |
| 10605530 | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace | Lucian Jdira, Chris G. M. de Ridder, Klaas P. Boonstra, Herbert Terhorst, Juul Keijser | 2020-03-31 |
| 10343907 | Method and system for delivering hydrogen peroxide to a semiconductor processing chamber | Bert Jongbloed, Dieter Pierreux, Cornelius A. van der Jeugd, Lucian Jdira, Radko G. Bankras | 2019-07-09 |