Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410522 | Substrate processing apparatus and method for processing substrates | Dieter Pierreux, Werner Knaepen, Jeroen Fluit | 2025-09-09 |
| 12387930 | Method and wafer processing furnace for forming an epitaxial stack of semiconductor epitaxial layers on a plurality of substrates | Dieter Pierreux, Kelly Houben, Steven R. A. Van Aerde, Wilco Verweij, Charles Dezelah | 2025-08-12 |
| 12362174 | Method and wafer processing furnace for forming an epitaxial stack on a plurality of substrates | Steven R. A. Van Aerde, Wilco Verweij, Dieter Pierreux, Kelly Houben, Rami Khazaka +4 more | 2025-07-15 |
| 12351902 | Methods and systems for delivery of vanadium compounds | Charles Dezelah, Qi Xie, Petri Raisanen, Dieter Pierreux, Werner Knaepen +1 more | 2025-07-08 |
| 12077854 | Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas | Dieter Pierreux, Theodorus G.M. Oosterlaken, Herbert Terhorst, Lucian Jdira | 2024-09-03 |
| 12040229 | Method for forming a structure with a hole | Dieter Pierreux, Steven R. A. Van Aerde | 2024-07-16 |
| 12000042 | Sequential infiltration synthesis apparatus and a method of forming a patterned structure | Jan Willem Maes, Werner Knaepen, Krzysztof Kamil Kachel, David Kurt de Roest, Dieter Pierreux | 2024-06-04 |
| 11990333 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2024-05-21 |
| 11898243 | Method of forming vanadium nitride-containing layer | Pia Homm Jara, Werner Knaepen, Dieter Pierreux, Panagiota Arnou, Ren-Jie Chang +3 more | 2024-02-13 |
| 11887857 | Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element | Dieter Pierreux, Qi Xie, Giuseppe Alessio Verni | 2024-01-30 |
| 11851755 | Sequential infiltration synthesis apparatus and a method of forming a patterned structure | Jan Willem Maes, Werner Knaepen, Krzysztof Kamil Kachel, David Kurt de Roest, Dieter Pierreux | 2023-12-26 |
| 11694892 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2023-07-04 |
| 11646204 | Method for forming a layer provided with silicon | Dieter Pierreux, Steven R. A. Van Aerde, Kelly Houben, Werner Knaepen, Wilco Verweij | 2023-05-09 |
| 11629407 | Substrate processing apparatus and method for processing substrates | Dieter Pierreux, Werner Knaepen, Jeroen Fluit | 2023-04-18 |
| 11610775 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Steven R. A. Van Aerde, Suvi Haukka +2 more | 2023-03-21 |
| 11594450 | Method for forming a structure with a hole | Dieter Pierreux, Steven R. A. Van Aerde | 2023-02-28 |
| 11532757 | Deposition of charge trapping layers | Pauline Calka, Qi Xie, Dieter Pierreux | 2022-12-20 |
| 11501968 | Method for providing a semiconductor device with silicon filled gaps | Dieter Pierreux, Anna Trovato, Kelly Houben, Steven R. A. Van Aerde, Wilco Verweij | 2022-11-15 |
| 11447861 | Sequential infiltration synthesis apparatus and a method of forming a patterned structure | Jan Willem Maes, Werner Knaepen, Krzysztof Kamil Kachel, David Kurt de Roest, Dieter Pierreux | 2022-09-20 |
| 11230766 | Substrate processing apparatus and method | Dieter Pierreux, Cornelis Thaddeus Herbschleb, Werner Knaepen, Steven R. A. Van Aerde, Kelly Houben +3 more | 2022-01-25 |
| 11107676 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2021-08-31 |
| 11088002 | Substrate rack and a substrate processing system and method | Dieter Pierreux, Werner Knaepen, Cornelis Thaddeus Herbschleb, Hessel Sprey | 2021-08-10 |
| 11056353 | Method and structure for wet etch utilizing etch protection layer comprising boron and carbon | Dieter Pierreux, Werner Knaepen | 2021-07-06 |
| 10954597 | Atomic layer deposition apparatus | Chris G. M. de Ridder, Lucian Jdira, Jeroen A. Smeltink | 2021-03-23 |
| 10741385 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2020-08-11 |