Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460932 | Semiconductor device with amorphous silicon filled gaps and methods for forming | Steven R. A. Van Aerde, Kelly Houben, Maarten Stokhof, Dieter Pierreux | 2019-10-29 |
| 10453685 | Forming semiconductor device by providing an amorphous silicon core with a hard mask layer | Kelly Houben, Steven R. A. Van Aerde, Maarten Stokhof, Dieter Pierreux, Werner Knaepen | 2019-10-22 |
| 10343907 | Method and system for delivering hydrogen peroxide to a semiconductor processing chamber | Dieter Pierreux, Cornelius A. van der Jeugd, Lucian Jdira, Radko G. Bankras, Theodorus G.M. Oosterlaken | 2019-07-09 |
| 10199223 | Semiconductor device fabrication using etch stop layer | Dieter Pierreux, Werner Knaepen | 2019-02-05 |
| 9991139 | Modular vertical furnace processing system | Theodorus G.M. Oosterlaken, Chris G. M. de Ridder | 2018-06-05 |
| 9916980 | Method of forming a structure on a substrate | Werner Knaepen, Jan Willem Maes, Krzysztof Kamil Kachel, Dieter Pierreux, David Kurt de Roest | 2018-03-13 |
| 9887082 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2018-02-06 |
| 9837281 | Cyclic doped aluminum nitride deposition | Dieter Pierreux, Werner Knaepen | 2017-12-05 |
| 9812320 | Method and apparatus for filling a gap | Viljami Pore, Werner Knaepen, Dieter Pierreux, Steven R. A. Van Aerde, Suvi Haukka +2 more | 2017-11-07 |
| 9799509 | Cyclic aluminum oxynitride deposition | Dieter Pierreux, Werner Knaepen | 2017-10-24 |
| 9711351 | Process for densifying nitride film | Dieter Pierreux | 2017-07-18 |
| 9576790 | Deposition of boron and carbon containing materials | Viljami Pore, Yosuke Kimura, Kunitoshi Namba, Wataru Adachi, Hideaki Fukuda +2 more | 2017-02-21 |
| 9552979 | Cyclic aluminum nitride deposition in a batch reactor | Werner Knaepen, Dieter Pierreux, Peter Zagwijn, Hessel Sprey, Cornelius A. van der Jeugd +4 more | 2017-01-24 |
| 9431238 | Reactive curing process for semiconductor substrates | Dieter Pierreux, Cornelius A. van der Jeugd, Herbert Terhorst, Lucian Jdira, Radko G. Bankras +1 more | 2016-08-30 |
| 8652573 | Method of CVD-depositing a film having a substantially uniform film thickness | Maarten Stokhof, Hessel Sprey, Tatsuya Yoshimi, Noureddine Adjeroud | 2014-02-18 |