Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685998 | Substrate processing apparatus, storage medium and substrate processing method | Takashi Wada, Satoru Noguchi, Daisuke Muramatsu | 2023-06-27 |
| D944946 | Shower plate | Takafumi Hisamitsu | 2022-03-01 |
| D935572 | Gas channel plate | — | 2021-11-09 |
| 11149350 | Shower plate structure for supplying carrier and dry gas | Kazuo Sato | 2021-10-19 |
| 10950449 | Substrate processing apparatus | Kazuo Sato | 2021-03-16 |
| 9663857 | Method for stabilizing reaction chamber pressure | Ryu Nakano | 2017-05-30 |
| 9576790 | Deposition of boron and carbon containing materials | Viljami Pore, Yosuke Kimura, Kunitoshi Namba, Hideaki Fukuda, Werner Knaepen +2 more | 2017-02-21 |
| 8911826 | Method of parallel shift operation of multiple reactors | Jeongsok Ha | 2014-12-16 |
| 8790743 | Method for controlling cyclic plasma-assisted process | Taku Omori, Naoki Inoue | 2014-07-29 |