Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217946 | Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-CAT | — | 2025-02-04 |
| 11940785 | Method for predicting maintenance for components used in substrate treatments, and predictive maintenance device | — | 2024-03-26 |
| 10331115 | Substrate processing system, storage medium and data processing method | — | 2019-06-25 |
| 10332767 | Substrate transport device and substrate processing apparatus | — | 2019-06-25 |
| 9778941 | Substrate processing system, storage medium and method of registering new device | — | 2017-10-03 |
| 9747092 | Substrate processing system and method of installing PLC software | — | 2017-08-29 |
| 8790743 | Method for controlling cyclic plasma-assisted process | Naoki Inoue, Wataru Adachi | 2014-07-29 |