| 11690159 |
Apparatus and method for extending target material delivery system lifetime |
Bob Rollinger, Georgiy O. Vaschenko, Chirag Rajyaguru, Alexander I. Ershov, Joshua Mark Lukens |
2023-06-27 |
$66,537,000 |
| 11013096 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, David Robert Evans, Jack Michael Gazza |
2021-05-18 |
|
| 10699946 |
Method of enabling seamless cobalt gap-fill |
Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more |
2020-06-30 |
$26,020,000 |
| 10477662 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, David Robert Evans, Jack Michael Gazza |
2019-11-12 |
|
| 10362664 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, David Robert Evans, Jack Michael Gazza |
2019-07-23 |
$17,083,000 |
| 10269633 |
Method of enabling seamless cobalt gap-fill |
Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more |
2019-04-23 |
$20,753,000 |
| 9888554 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, David Robert Evans, Jack Michael Gazza |
2018-02-06 |
$21,359,000 |
| 9842769 |
Method of enabling seamless cobalt gap-fill |
Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more |
2017-12-12 |
$38,022,000 |
| 9685371 |
Method of enabling seamless cobalt gap-fill |
Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more |
2017-06-20 |
$22,588,000 |
| 9570307 |
Methods of doping substrates with ALD |
Aneesh Nainani, Er-Xuan Ping |
2017-02-14 |
$30,741,000 |
| 9543172 |
Apparatus for providing and directing heat energy in a process chamber |
Joseph R. Johnson, Joseph M. Ranish, John E. Gerling, Aaron Muir Hunter, Aneesh Nainani |
2017-01-10 |
$27,103,000 |
| 9378941 |
Interface treatment of semiconductor surfaces with high density low energy plasma |
Aneesh Nainani, Bhushan Zope, Leonid Dorf, Shahid Rauf, Adam Brand +1 more |
2016-06-28 |
$9,817,000 |
| 9330939 |
Method of enabling seamless cobalt gap-fill |
Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more |
2016-05-03 |
$10,420,000 |
| 9218973 |
Methods of doping substrates with ALD |
Aneesh Nainani, Er-Xuan Ping |
2015-12-22 |
$10,069,000 |
| 6433663 |
High voltage transformer arrangement |
William V. Fitzgerald, Brian P. Michael |
2002-08-13 |
$108,000 |
