Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Bob Rollinger, Georgiy O. Vaschenko, Chirag Rajyaguru, Alexander I. Ershov, Joshua Mark Lukens | 2023-06-27 |
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2021-05-18 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2020-06-30 |
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2019-07-23 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2019-04-23 |
| 9888554 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2018-02-06 |
| 9842769 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2017-12-12 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2017-06-20 |
| 9570307 | Methods of doping substrates with ALD | Aneesh Nainani, Er-Xuan Ping | 2017-02-14 |
| 9543172 | Apparatus for providing and directing heat energy in a process chamber | Joseph R. Johnson, Joseph M. Ranish, John E. Gerling, Aaron Muir Hunter, Aneesh Nainani | 2017-01-10 |
| 9378941 | Interface treatment of semiconductor surfaces with high density low energy plasma | Aneesh Nainani, Bhushan Zope, Leonid Dorf, Shahid Rauf, Adam Brand +1 more | 2016-06-28 |
| 9330939 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2016-05-03 |
| 9218973 | Methods of doping substrates with ALD | Aneesh Nainani, Er-Xuan Ping | 2015-12-22 |
| 6433663 | High voltage transformer arrangement | William V. Fitzgerald, Brian P. Michael | 2002-08-13 |