Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

US Patent 11013096 · Granted May 18, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Display device2025
Semiconductor device2025
Cleaning a structure surface in an EUV chamber2025
Cleaning a structure surface in an EUV chamber2025
Electrostatic chuck with multiple radio frequency meshes to control plasma unifo2024
Device and method for tuning plasma distribution using phase control2024
Apparatus and method for extending target material delivery system lifetime2023
Cleaning a structure surface in an EUV chamber2022
Cleaning a structure surface in an EUV chamber2022
Film stack overlay improvement2022
Semiconductor device including dummy gate patterns and manufacturing method ther2022
Method of enabling seamless cobalt gap-fill2020