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System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, Mathew Abraham, David Robert Evans |
2021-05-18 |
| 10477662 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, Mathew Abraham, David Robert Evans |
2019-11-12 |
| 10362664 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, Mathew Abraham, David Robert Evans |
2019-07-23 |
| 9888554 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, Mathew Abraham, David Robert Evans |
2018-02-06 |
| 7144597 |
Electrostatic application of powder material to solid dosage forms utilizing an electrically conductive shield |
Marshall Whiteman, Martin Hallett, David Hoover Feather, Douglas Howard Nelson |
2006-12-05 |
| 5601391 |
Dual gripper picker assembly for an automated storage system |
— |
1997-02-11 |
| 5555776 |
Cam integrated with a rotation sensor |
— |
1996-09-17 |
| 5532931 |
Low tolerance positioning system in an automated handling system |
Jack Erickson, Victor Olivas, Charles A. Thompson, JR. |
1996-07-02 |
| 5460476 |
Dual gripper picker assembly for an automated storage system |
— |
1995-10-24 |
| D362247 |
Hinged front panel for a tape drive loader with a security lock cover |
Jack Erickson, Thomas E. Mallette, Victor Olivas |
1995-09-12 |