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| 11347154 |
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| 11013096 |
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| 10681795 |
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Alexander I. Ershov, Matthew R. Graham |
2020-06-09 |
| 10477662 |
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Jonghoon Baek, Mathew Abraham, Jack Michael Gazza |
2019-11-12 |
| 10362664 |
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2019-07-23 |
| 10237960 |
Apparatus for and method of source material delivery in a laser produced plasma EUV light source |
Alexander I. Ershov, Matthew R. Graham |
2019-03-19 |
| 9888554 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Jonghoon Baek, Mathew Abraham, Jack Michael Gazza |
2018-02-06 |
| 9795023 |
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| 9301382 |
Apparatus for and method of source material delivery in a laser produced plasma EUV light source |
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2016-03-29 |
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Electric discharge apparatus |
John E. Harry |
1989-09-12 |