Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen +2 more | 2025-01-07 |
| 11347154 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen +2 more | 2022-05-31 |
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2021-05-18 |
| 10681795 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, Matthew R. Graham | 2020-06-09 |
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2019-07-23 |
| 10237960 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, Matthew R. Graham | 2019-03-19 |
| 9888554 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2018-02-06 |
| 9795023 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, Matthew R. Graham | 2017-10-17 |
| 9301382 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, Matthew R. Graham | 2016-03-29 |
| 4866728 | Electric discharge apparatus | John E. Harry | 1989-09-12 |