Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, David Robert Evans +2 more | 2025-01-07 |
| 11347154 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, David Robert Evans +2 more | 2022-05-31 |