Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420486 | Multi-scale system for projection micro stereolithography | Jiawen XU | 2025-09-23 |
| 12397500 | System and method of low-waste multi-material resin printing | — | 2025-08-26 |
| 12389519 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodrigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2025-08-12 |
| 12251879 | Methods of controlling dimensions in projection micro stereolithography | — | 2025-03-18 |
| 12189313 | Cleaning a structure surface in an EUV chamber | Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2025-01-07 |
| 11822252 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodreigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2023-11-21 |
| 11725282 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak, Karl Leeser | 2023-08-15 |
| 11654619 | Immersion multi-material projection micro stereolithography with non-stick gas permeable transparent membrane | — | 2023-05-23 |
| 11654617 | Immersion projection micro stereolithography | Alexander H. Slocum, John Kawola, Jason Bassi | 2023-05-23 |
| 11347154 | Cleaning a structure surface in an EUV chamber | Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2022-05-31 |
| 11111581 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak, Karl Leeser | 2021-09-07 |
| 10955749 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodriges Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2021-03-23 |
| 10287683 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak, Karl Leeser | 2019-05-14 |
| 10232413 | Controlled fluid flow for cleaning an optical element | Silvia De Dea, Gregory J. Wilson, Brandon Wilson Verhoff | 2019-03-19 |
| 9776218 | Controlled fluid flow for cleaning an optical element | Silvia De Dea, Gregory J. Wilson, Brandon Wilson Verhoff | 2017-10-03 |
| 9490149 | Chemical deposition apparatus having conductance control | Ramesh Chandrasekharan, Karl Leeser, Jeremy Tucker | 2016-11-08 |
| 9388494 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak, Karl Leeser | 2016-07-12 |
| 9201511 | Optical navigation sensor and method | Brett A. Spurlock, Yansun Xu, Huy Tae, John Frame | 2015-12-01 |
| 8985152 | Point of use valve manifold for semiconductor fabrication equipment | Ramesh Chandrasekharan, Karl Leeser, Damien Slevin, Thomas G. Jewell | 2015-03-24 |