Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11028482 | Use of voltage and current measurements to control dual zone ceramic pedestals | Aaron Durbin, Ramesh Chandrasekharan, Dirk Rudolph | 2021-06-08 |
| 10633742 | Use of voltage and current measurements to control dual zone ceramic pedestals | Aaron Durbin, Ramesh Chandrasekharan, Dirk Rudolph | 2020-04-28 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |
| 8985152 | Point of use valve manifold for semiconductor fabrication equipment | Ramesh Chandrasekharan, Chunguang Xia, Karl Leeser, Damien Slevin | 2015-03-24 |
| 8728956 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2014-05-20 |