Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12352371 | Fluid control device and method for fluid control in an extreme ultraviolet light source | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Theodorus Wilhelmus Driessen | 2025-07-08 |
| 12324084 | Apparatus for and method of controlling droplet generator performance | Pooriya Beyhaghi | 2025-06-03 |
| 12273986 | Target delivery system | Georgiy O. Vaschenko | 2025-04-08 |
| 11856681 | Target delivery system | Georgiy O. Vaschenko | 2023-12-26 |
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Georgiy O. Vaschenko, Chirag Rajyaguru, Alexander I. Ershov, Joshua Mark Lukens, Mathew Abraham | 2023-06-27 |
| 11240904 | Apparatus for and method of controlling coalescence of droplets in a droplet stream | Joshua Mark Lukens, Pooriya Beyhaghi | 2022-02-01 |
| 10306742 | Droplet dispensing device, method for providing droplets, and light source for providing UV or X-ray light | Alexander Sanders, Reza Abhari | 2019-05-28 |
| 10028367 | Device and method for generating UV or X-ray radiation by means of a plasma | Markus Brandstätter, Reza Abhari | 2018-07-17 |
| 9911572 | Method for controlling an interaction between droplet targets and a laser and apparatus for conducting said method | Nadia Gambino, Reza Abhari, Flori Alickaj, Felix Daners, Andrea Giovannini +1 more | 2018-03-06 |
| 9307625 | Droplet dispensing device and light source comprising such a droplet dispensing device | Reza Abhari, Andrea Giovannini, Ian Henderson | 2016-04-05 |
| 8723147 | Extreme ultraviolet light source with a debris-mitigated and cooled collector optics | Reza Abhari, Andrea Giovannini, Davide Bleiner | 2014-05-13 |