Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for providing and directing heat energy in a process chamber

Apparatus for providing and directing heat energy in a process chamber

US Patent 9543172 · Granted Jan 10, 2017

Estimated economic value: $27,103,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for controlling a flow process material to a deposition cha2025
Pulse train annealing method and apparatus2025
Multi zone spot heating in EPI2024
Multi-tone scheme for maskless lithography2024
Annealing apparatus using two wavelengths of radiation2024
Annealing apparatus using two wavelengths of radiation2024
System for non radial temperature control for rotating substrates2024
System for non radial temperature control for rotating substrates2024
Nanofluidic device with silicon nitride membrane2023
Multi zone spot heating in EPI2023
Decreasing distortion by modifying pixel spacing2023
Method to achieve non-crystalline evenly distributed shot pattern for digital li2023