Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276023 | Showerhead assembly for distributing a gas within a reaction chamber | Melvin Verbaas, John Kevin Shugrue, Carl Louis White | 2025-04-15 |
| 11967488 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Dong Li, Xichong Chen | 2024-04-23 |
| 11946136 | Semiconductor processing device | Eric James Shero, Carl Louis White, Shankar Swaminathan, Bhushan Zope | 2024-04-02 |
| 11891693 | Systems and methods for controlling vapor phase processing | Cheuk Li, Michael F. Schultz, John Kevin Shugrue | 2024-02-06 |
| 11830731 | Semiconductor deposition reactor manifolds | Dinkar Nandwana, Eric James Shero, Carl Louis White, Todd Robert Dunn, William George Petro +1 more | 2023-11-28 |
| 11788190 | Liquid vaporizer | — | 2023-10-17 |
| 11492701 | Reactor manifolds | Dinkar Nandwana, Eric James Shero, Todd Robert Dunn, Carl Louis White | 2022-11-08 |
| 11359286 | Quartz crystal microbalance concentration monitor | Mohith Verghese | 2022-06-14 |
| 10858737 | Showerhead assembly and components thereof | Carl Louis White, Eric James Shero, David Marquardt | 2020-12-08 |
| 10787741 | Method and system for in situ formation of gas-phase compounds | John Tolle, Eric Hill | 2020-09-29 |
| 10774422 | Systems and methods for controlling vapor phase processing | Cheuk Li, Michael F. Schultz, John Kevin Shugrue | 2020-09-15 |
| 10366864 | Method and system for in-situ formation of intermediate reactive species | — | 2019-07-30 |
| 10340125 | Pulsed remote plasma method and system | — | 2019-07-02 |
| 9890456 | Method and system for in situ formation of gas-phase compounds | John Tolle, Eric Hill | 2018-02-13 |
| 9605343 | Method for forming conformal carbon films, structures conformal carbon film, and system of forming same | — | 2017-03-28 |
| 9589770 | Method and systems for in-situ formation of intermediate reactive species | — | 2017-03-07 |
| 9484191 | Pulsed remote plasma method and system | — | 2016-11-01 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Dong Li, Xichong Chen | 2016-01-05 |
| 9181097 | Apparatus and methods for safely providing hazardous reactants | Ofer Sneh | 2015-11-10 |
| 8894870 | Multi-step method and apparatus for etching compounds containing a metal | Eric James Shero, Fred Alokozai | 2014-11-25 |
| 6720259 | Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition | Ana R. Londergan, Sasangan Ramanathan, Thomas E. Seidel | 2004-04-13 |