Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159608 | Method for forming TiSiN thin film layer by using atomic layer deposition | Woong Park, Young Jin Jang, Gi Youl Kim, Brian Lu, Greg Siu +1 more | 2015-10-13 |
| 7981473 | Transient enhanced atomic layer deposition | Gi Youl Kim, Anuranjan Srivastava, Thomas E. Seidel, Ana R. Londergan | 2011-07-19 |
| 6951765 | Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor | Sanjay Gopinath, Patrick A. Van Cleemput, Michelle T. Schulberg, Francisco Juarez, Patrick Joyce | 2005-10-04 |
| 6887781 | Method for the formation of diffusion barrier | Sang-Hyeob Lee | 2005-05-03 |
| 6720259 | Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition | Ana R. Londergan, Jereld Lee Winkler, Thomas E. Seidel | 2004-04-13 |
| 6589887 | Forming metal-derived layers by simultaneous deposition and evaporation of metal | Jeremie J. Dalton, Ronald A. Powell, Sridhar Karthik Kailasam | 2003-07-08 |
| 6071555 | Ferroelectric thin film composites made by metalorganic decomposition | Somnath Sengupta, Steven Stowell, Louise Sengupta, Pooran Chandra Joshi, Seshu B. Desu | 2000-06-06 |
| 6015759 | Surface modification of semiconductors using electromagnetic radiation | Ashraf Khan, Giovanni Antonio Foggiato | 2000-01-18 |
| 5887117 | Flash evaporator | Seshu B. Desu, Carlos Tres Avala Suchicital | 1999-03-23 |