| 7309418 |
Water contaminant indicators |
Toni L. Lynch, Edward B. Rinker |
2007-12-18 |
| 6951765 |
Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor |
Sanjay Gopinath, Patrick A. Van Cleemput, Michelle T. Schulberg, Sasangan Ramanathan, Francisco Juarez |
2005-10-04 |
| 6905556 |
Method and apparatus for using surfactants in supercritical fluid processing of wafers |
Raashina Humayun, Adrianne K. Tipton, Krishnan Shrinivasan, Dennis W. Hess, Satyanarayana Myneni +1 more |
2005-06-14 |
| 6805801 |
Method and apparatus to remove additives and contaminants from a supercritical processing solution |
Raashina Humayun |
2004-10-19 |
| 6800142 |
Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment |
Adrianne K. Tipton, Krishnan Shrinivasan, Souvik Banerjee, Raashina Humayun |
2004-10-05 |
| 6764552 |
Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials |
Adrianne K. Tipton, Krishnan Shrinivasan, Dennis W. Hess, Satyanarayana Myneni, Galit Levitin |
2004-07-20 |
| 6715498 |
Method and apparatus for radiation enhanced supercritical fluid processing |
Raashina Humayun, Vishal Gauri, Adrianne K. Tipton |
2004-04-06 |