Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7589028 | Hydroxyl bond removal and film densification method for oxide films using microwave post treatment | Seon-Mee Cho, Mike Barnes, George D. Papasouliotis | 2009-09-15 |
| 7208389 | Method of porogen removal from porous low-k films using UV radiation | Adrianne K. Tipton, Brian Lu, Patrick A. Van Cleemput, Qingguo Wu, Haiying Fu +1 more | 2007-04-24 |
| 7176144 | Plasma detemplating and silanol capping of porous dielectric films | Feng Wang, Jianing Sun, Raashina Humayun, Patrick A. Van Cleemput | 2007-02-13 |
| 6951765 | Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor | Sanjay Gopinath, Patrick A. Van Cleemput, Sasangan Ramanathan, Francisco Juarez, Patrick Joyce | 2005-10-04 |
| 6576345 | Dielectric films with low dielectric constants | Patrick A. Van Cleemput, Ravi Laxman, Jen Shu, Bunsen B. Nie | 2003-06-10 |
| 6340628 | Method to deposit SiOCH films with dielectric constant below 3.0 | Patrick A. Van Cleemput, Ravi Laxman, Jen Shu, Bunsen B. Nie | 2002-01-22 |